Combinatorial Sputtering

The animation displays the combinatorial sputtering procedure used by the Dahn Group at Dalhousie University. In this example a ternary is being sputtered. The composition gradients are orthogonal to each other and a large continuous region of the composition space is produced in a single run. A typical run consists of thousands of revolutions leading to a micron thick film. The sputtering table (big rotating disc) is 40.6 cm wide.
  • If the animation doesn't load get Flash Player 
  • Press "Components" to see the different components of the sputtering table
  • Press "Sputter" to see an animation of a sputtering run